Publications

 

                                                                             2018


  1. 1. Disrupting the spatio-temporal symmetry of the electron dynamics in atmospheric pressure plasmas by voltage waveform tailoring, A. Gibson, Z. Donko, L. Alelyani, L. Bischoff, G. Hübner, J. Bredin, S. Doyle, I. Korolov, K. Niemi, T.   Mussenbrock, P. Hartmann, J. P. Dedrick, J. Schulze, T. Gans, and D. O`Connell, Plasma Sourc. Sci. Technol., accepted

  2. 2. Experimental and computational investigations of the effect of the electrode gap on capacitively coupled radio frequency oxygen discharges, K. H. Hou, J. Schulze, A. Derzsi, Z. Donko, H. J. Yeom, J. H. Kim, D. J. Seong, and H. C. Lee, E Phys. Plasmas, accepted

  3. 3. Experimental and computational investigations of electron dynamics in micro atmospheric pressure radio-frequency plasma jets operated in He/N2 mixtures, L. Bischoff, G. Hübner, I. Korolov, Z. Donko, P. Hartmann, T. Gans, J. Held, V. Schulz-von der Gatten, Y. Liu, T. Mussenbrock, and J. Schulze, Plasma Sourc. Sci. Technol. accepted

  4. 4. Material dependent modeling of secondary electron emission coecients and its effects on PIC/MCC simulation results of capacitive RF plasmas, M. Daksha, A. Derzsi, Z. Donko, and J. Schulze, Plasma Sourc. Sci. Technol. submitted

  5. 5. Observation of the generation of multiple electron beams during a single sheath expansion phase in capacitive RF plasmas, B. Berger, K. You, H.-C. Lee, T. Mussenbrock, P. Awakowicz, J. Schulze, Plasma Sourc. Sci. Technol. accepted

  6. 6. Disparity between current and voltage driven capacitively coupled radio frequency discharges, S. Wilczek, J. Trieschmann, J. Schulze, Z. Donko, R. P. Brinkmann, T. Mussenbrock, Plasma Sourc. Sci. Technol. accepted

  7. 7. Ion energy and angular distributions in low-pressure capacitive oxygen RF discharges driven by tailored voltage waveforms, Z. Donko, A. Derzsi, M. Vass, J. Schulze, E. Schuengel, S. Hamaguchi, 2018, Plasma Sourc. Sci. Technol. 104008

  8. 8. Experimental investigations of the magnetic asymmetry effect in capacitively coupled radio frequency plasmas, M. Oberberg, J. Kallähn, P. Awakowicz, J. Schulze, 2018, Plasma Sourc. Sci. Technol. 27 105018

  9. 9. Multi frequency matching for voltage waveform tailoring, F. Schmidt, J. Schulze, E. Johnson, J. P. Booth, D. Keil, D. M. French, J. Trieschmann, T. Mussenbrock, 2018, Plasma Sourc. Sci. Technol. 27 095012

10. Spatially resolved characterization of a dc magnetron plasma using optical emission spectroscopy, S. Ries, N. Bibinov, M. Rudolph, J. Schulze, S. Mraz, J. M. Schneider, P. Awakowicz, 2018, Plasma Sourc. Sci. Technol. 27 094001

11. The effect of electron induced secondary electrons on the characteristics of low-pressure capacitively coupled radio frequency plasmas, B. Horvath, J. Schulze, Z. Donko, A. Derzsi, 2018, J. Phys. D 51 355204

12. Spatio-temporal analysis of the electron power absorption in electropositive capacitive RF plasmas based on moments of the Boltzmann equation, J. Schulze, Z. Donko, T. Lafleur, S. Wilczek, R. P. Brinkmann, 2018, Plasma Sourc. Sci. Technol. 27 055010

13. The electrical asymmetry effect in a multi frequency geometrically asymmetric capacitively coupled plasma: A study by a nonlinear global model, P. Saika, H. Bhuyan, M. Escalona, M. Favre, B. Bora, M. Kakati, E. Wyndham, R. Rawat, and J. Schulze, 2018, J. Appl. Phys., 123 183303

14. Study of dual radio frequency capacitively coupled plasma: An analytical treatment matched to an experiment, P. Saika, H. Bhuyan, M. Escalona, M. Favre, E. Wyndham, J. Maze, and J. Schulze, 2018, Plasma Sourc. Sci. Technol., 70 015014

15. Experimental benchmark of kinetic simulations of capacitively coupled plasmas in molecular gases, Z. Donko, A. Derzsi, I. Korolov, P. Hartmann, S. Brandt, J. Schulze, B. Berger, M. Koepke, B. Bruneau, E. Johnson, T. Lafleur, J. P. Booth, A. Gibson, D. O’Connell, T. Gans, 2018, Plasma Phys. Contr. Fusion, 60 014010


2017


  1. 1.A simple model for ion flux-energy distribution functions in capacitively coupled radio-frequency plasmas driven by arbitrary voltage waveforms, E. Schüngel, Z. Donko, J. Schulze, Plasma Proc. Polymers 2017 14 1600117


  1. 2.Striations in electronegative capacitively coupled radio-frequency plasmas: analysis of the pattern formation and the effect of the driving frequency, Y.-X. Liu, I. Korolov, E. Schüngel, Y.-N. Wang, Z. Donko, J. Schulze, Plasma Sourc. Sci. Technol. 2017 26 055024


  1. 3.QDB: a new database of plasma chemistries and reactions, J. Tennyson, S. Rahimi, C. Hill, L. Tse, A. Vibhakar, D. Akello-Egwel, D. Brown, A. Dzarasova, J. Hamilton, D. Jaksch. S. Mohr, K. Wren-Little, J. Bruckmeier, A. Agarwal, K. Bartschat, A. Bogaerts, J. P. Booth, M. Gloeckner, K. Hassouni, Y. Itikiaw, B. Braams, E. Krishnakumar, A. Laricchiuta, N. Mason, S. Pandey, Z. Petrovic, Y.-K. Pu, A. Ranjan, S. Rauf, J. Schulze, M. Turner, P. Ventzek, J. Whitehead, J. Yoon, Plasma Sourc. Sci. Technol. 2017 26 055014


  1. 4.Striations in electronegative capacitively coupled radio-frequency plasmas: Effects of the pressure, voltage, and electrode gap, Y.-X. Liu, I. Korolov, E. Schüngel, Y.-N. Wang, Z. Donko, J. Schulze, Phys. of Plasmas 2017 24 073512


  1. 5.The effect of realistic heavy particle induced secondary electron emission coefficients on the electron power absorption dynamics in single- and dual-frequency capacitively coupled plasmas, M. Daksha, A. Derzsi, S. Wilczek, J. Trieschmann, T. Mussenbrock, P. Awakowicz, Z. Donko, J. Schulze, Plasma Sourc. Sci. Technol. 2017 26 085006


  1. 6.The role of electron induced secondary electron emission from SiO2 surfaces in capacitively coupled radio frequency plasmas operated at low pressures, B. Horvath, M. Daksha, I. Korolov, A. Derzsi, and J. Schulze, 2017, Plasma Sourc. Sci. Technol., 26 124001


  1. 7.Enhanced power coupling efficiency in inductive discharges with RF substrate bias driven at consecutive harmonics with adjustable phase, B. Berger, T. Steinberger, E. Schüngel, M. Koepke, T. Mussenbrock, P. Awakowicz, and J. Schulze,  2017, Appl. Phys. Lett., 111 201601



2016


  1. 1.Electron heating in technological plasmas - J. Schulze, T. Mussenbrock, Plasma Sourc. Sci. Technology 2016 25 020401


  1. 2.The influence of electron reflection/sticking coefficients at the electrodes on plasma parameters in particle-in-cell simulations of capacitive radio-frequency plasmas, I. Korolov, A. Derzsi, Z. Donko, E. Schüngel, and J. Schulze, Plasma Sourc. Sci. Technol. 2016 25 015024


  1. 3.Effect of gas properties on the dynamics of the electrical slope asymmetry effect in capacitive plasmas: comparison of Ar, H2 and CF4, B. Bruneau, T. Lafleur, T. Gans, D. OConnell, A. Greb, I. Korolov, A. Derzsi, Z. Donko, S. Brandt, E. Schüngel, J. Schulze, P. Diomede, D. J. Economou, S. Longo, E. Johnson, J. P. Booth, Plasma Sourc. Sci. Technol. 2016 25 01LT02


  1. 4.Capacitive radio frequency discharges with a single ring-shaped narrow trench of various depths to enhance the plasma density and lateral uniformity, Y. Ohtsu, N. Matsumoto, J. Schulze, E. Schüngel, Phys. of Plasmas 2016 23 033510


  1. 5.A computationally assisted spectroscopic technique to measure secondary electron emission coefficients in radio frequency plasmas, M. Daksha, B. Berger, E. Schuengel, I. Korolov, A. Derzsi, M. Koepke, Z. Donko, J. Schulze, J. Phys. D 2016 49 234001


  1. 6.Slope and amplitude asymmetry effects on low frequency capacitively coupled carbon tetrafluoride plasmas, B. Bruneau, I. Korolov, T. Lafleur, T. Gans, D. OConnell, A. Greb, A. Derzsi, Z. Donko, S. Brandt, E. Schüngel, J. Schulze, E. Johnson, J. P. Booth, J. Appl. Phys. 2016 119 163301


  1. 7.Kinetic interpretation of resonance phenomena in low pressure capacitively coupled radio frequency plasmas, S. Wilczek, J. Trieschmann, D. Eremin, R. P. Brinkmann, J. Schulze, E. Schuengel, A. Derzsi, I. Korolov, P. Hartmann, Z. Donko, T. Mussenbrock, Phys. of Plasmas 2016 23 063514


  1. 8.Experimental observation and computational analysis of striations in electronegative capacitively coupled radio-frequency plasmas, Y.-X. Liu, E. Schüngel, I. Korolov, Z. Donko, Y.-N. Wang, J. Schulze, Phys. Rev. Lett. 2016 116 255002


  1. 9.Electron power absorption dynamics in capacitive radio frequency discharges driven by tailored voltage waveforms in CF4, S. Brandt, B. Berger, E. Schüngel, I. Korolov, A. Derzsi, B. Bruneau, E. Johnson, T. Lafleur, D. OConnell, M. Koepke, T. Gans, J. P. Booth, Z. Donko, J. Schulze, Plasma Sourc. Sci. Technol. 2016 25 045015


  1. 10. Tailored voltage waveform capacitively coupled plasmas in electronegative gases: frequency dependence of asymmetry effect, E. Schüngel, I. Korolov, B. Bruneau, A. Derzsi, E. Johnson, D. OConnell, T. Gans, J. P. Booth, Z. Donko, J. Schulze, J. Phys. D 2016 49 265203


2015


  1. 1.Experimental investigations of electron heating dynamics and ion energy distributions in capacitive discharges driven by customized voltage waveforms, B. Berger, S. Brandt, J. Franek, E. Schüngel, M. Koepke, T. Mussenbrock, J. Schulze, J. Appl. Phys. 2015 118 223302


  1. 2.Customized ion flux-energy distribution functions in capacitively coupled plasmas by voltage waveform tailoring, E. Schüngel. Z. Donko, P. Hartmann, A. Derzsi, I. Korolov, J. Schulze, Plasma Sourc. Sci. Technol. 2015 24 045013


  1. 3.Electron heating via self-excited plasma series resonance in geometrically symmetric multi-frequency

    capacitive plasmas, E. Schüngel, S Brandt, Z. Donko, I. Korolov, A. Derzsi, J. Schulze, Plasma Sourc.

    Sci. Technol. 2015 24 044009


  1. 4.Influence of a phase-locked RF substrate bias on the E-toH-mode transition in an inductively coupled

    plasma, P. Ahr, E. Schüngel, J. Schulze, T. Tsankov, U. Czarnetzki, Plasma Sourc. Sci. Technol.

    2015 24 044006


  1. 5.Power supply and impedance matching to drive technological radio-frequency plasmas with customized voltage waveforms - J. Franek, S. Brandt, B. Berger, M. Liese, M. Barthel, E. Schuengel, J. Schulze, Rev. Sci. Instr. 2015 86 053504


  1. 6.The effect of the driving frequency on the confinement of beam electrons and plasma density in low pressure capacitive discharges - S. Wilczek, J. Trieschmann, J. Schulze, E. Schuengel, R. P. Brinkmann, A. Derzsi, I. Korolov, Z. Donko, T. Mussenbrock 2015 Plasma Sourc. Sci. Technol. 24 024002


  1. 7.On the self-excitation mechanisms of plasma series resonance oscillations in single- and multi-frequency capacitive discharges - E. Schuengel, S. Brandt, I. Korolov, A. Derzsi, Z. Donko, J. Schulze 2015 Phys. of Plasmas 22 043512


  1. 8.The effect of ambipolar electric fields on the electron heating in capacitive RF plasmas - J. Schulze, Z. Donko, A. Derzsi, I. Korolov, E. Schuengel 2015 Plasma Sourc. Sci. Technol. 24 015019


  1. 9.Prevention of ion flux lateral inhomogeneities in large area capacitive radio frequency plasmas via the electrical asymmetry effect - E. Schuengel, S. Mohr, J. Schulze, U. Czarnetzki 2015 Appl. Phys. Lett. 106 054108


  1. 10. Effects of fast atoms and energy-dependent secondary electron emission yields in PIC/MCC simulations of capacitively coupled plasmas - A. Derzsi, I. Korolov, E. Schuengel, Z. Donko, J. Schulze 2015 Plasma Sourc. Sci. Technol. 24 034002


  1. 11. Evaluation of the Electrical Asymmetry Effect by spectroscopic measurements of capacitively coupled discharges and silicon thin film depositions - E. Schuengel, R. Hofmann, S. Mohr, J. Schulze, J. Roepcke, U. Czarnetzki, 2015 Thin Solid Films 574 60


  1. 12. Electron heating modes and frequency coupling effects in dual-frequency capacitive CF4 plasmas - A. Derzsi, E. Schuengel, Z. Donko, J. Schulze, 2015 Open Chemistry 13 346


2014


  1. 1.Complex Electron Heating in Capacitie Multi-Frequency Plasmas - J. Schulze, E. Schüngel, A. Derzsi,

     I. Korolov, T. Mussenbrock, Z. Donko IEEE Trans. on Plasma Sci. 2014 42 2780


  1. 2.Dust Hour Glass in a Capacitive RF Discharge - S. Iwashita, E. Schüngel,  J. Schulze, P. Hartmann, 

     Z. Donko, G. Uchida, K. Koga, M. Shiratani, U. Czarnetzki IEEE Trans. on Plasma Sci. 2014 42 2672


3. Ion Distribution Functions in Electrically Asymmetric Capacitively Coupled Radio-Frequency

    Discharges in Hydrogen - S. Mohr, E. Schüngel, J. Schulze, U. Czarnetzki IEEE Trans. on Plasma

    Sci. 2014 42 2376


4. Ion distribution functions at the electrodes of capacitively coupled high-pressure hydrogen discharges

    - E. Schüngel, S. Mohr, J. Schulze, U. Czarnetzki, M. J. Kushner 2014 Plasma Sourc. Sci. Technol.

    23 015001


2013


1. Coupling effects of driving frequencies on the electron heating in electronegative capacitive dual-

    frequency plasmas - A. Derzsi, Z. Donko, J. Schulze 2013 J. Phys. D FTC 46 482001


2. Electron heating and control of ion properties in capacitive discharges driven by customized voltage

    waveforms - A. Derzsi, I. Korolov, E. Schüngel, Z. Donko, J. Schulze 2013 Plasma Sourc. Sci.

    Technol. 22 065009


  1. 3.Effect of structured electrodes on heating and plasma uniformity in capacitive discharges - N.

    Schmidt, J. Schulze, E. Schüngel, U. Czarnetzki 2013 J. Phys. D 46 505202


4. Field Reversals in electrically asymmetric capacitively coupled radio-frequency discharges in

    hydrogen - S. Mohr, E. Schüngel, J. Schulze, U. Czarnetzki 2013 J. Phys. D 46 435201


  1. 5.Kinetic simulation of the sheath dynamics in the intermediate radio frequency regime - M. Shihab, A.

    T. Elgendy, I. Korolov, A. Derzsi, J. Schulze, D. Eremin, T. Mussenbrock, Z. Donko, R. P. Brinkmann

    2013 Plasma Sourc. Sci. Technol. 22 055013


6. The influence of the secondary electron induced asymmetry on the electrical asymmetry effect in

    capacitively coupled plasmas - I. Korolov, A. Derzsi, Z. Donko, J. Schulze 2013 Appl. Phys. Lett. 103

    064102


7. The effect of dust on electron heating and dc self-bias in hydrogen diluted silane discharges - E.

     Schüngel, S. Mohr, J. Schulze, U. Czarnetzki 2013 J. Phys. D 46 175205


8. Transport of dust particles via the electrical asymmetry effect: experiment, simulation, and modelling -

     S. Iwashita, E. Schüngel, J. Schulze, P. Hartmann, Z. Donko, G. Uchida, K. Koga, M. Shiratani, U.

     Czarnetzki 2013 J. Phys. D 46 245202


9. Ionization by bulk heating of electrons in capacitive radio frequency atmospheric pressure

    microplasmas - T. Hemke, D. Eremin, T. Mussenbrock, A. Derzsi, Z. Donko, K. Dittmann, J.

    Meichsner, J. Schulze 2013 Plasma Sources Science and Technology 22 015012


2012


1. Fundamental investigations of capacitive radio frequency plasmas: simulations and experiments - Z.  

    Donko, J. Schulze, U. Czarnetzki, A. Derzsi, P. Hartmann, I. Korolov, E. Schüngel 2012 Plasma

    Physics and Controlled Fusion 54 124003


  1. 2.The effect of the driving frequencies on the electrical asymmetry of dual-frequency capacitively 

     coupled plasmas - I. Korolov, Z. Donko, U. Czarnetzki, J. Schulze 2012 J. Phys. D 45 465205


  1. 3.The Electrical Asymmetry Effect in geometrically asymmetric capacitive radio frequency plasmas -

    E. Schüngel, D. Eremin, J. Schulze, T. Mussenbrock, U. Czarnetzki 2012 J. Appl. Phys. 112 053302


4. Coupling effects in inductive discharges with radio frequency substrate biasing - J. Schulze, E.

    Schüngel, U. Czarnetzki 2012 Appl. Phys. Lett. 100 024102


5. Sheath-to-sheath transport of dust particles in a capacitively coupled discharge - S. Iwashita,

    G. Uchida, J. Schulze, E. Schüngel, P. Hartmann, M. Shiratani, Z. Donko, U. Czarnetzki 2012

    Plasma Sourc. Sci. Technol. 21 032001


2011


1. Ionization by Drift and Ambipolar Electric Fields in Electronegative Capacitive Radio Frequency

    Plasmas - J. Schulze, A. Derzsi, K. Dittmann, T. Hemke, J. Meichsner, Z. Donko 2011 Phys. Rev.

    Lett. 107 275001


2. Kinetic simulations of a nanosecond-pulsed hydrogen microdischarge - Z. Donko, J. Schulze, S.

    Müller, U. Czarnetzki 2011 Appl. Phys. Lett. 98 251502


3. Electron Heating and the Electrical Asymmetry Effect in dual-frequency capacitive CF4 discharges -

    J. Schulze, A. Derzsi, Z. Donko 2011 Plasma Sourc. Sci. Technol. 20 045008


4. Control of plasma properties in capacitively coupled oxygen discharges via the Electrical Asymmetry

    Effect - E. Schüngel, Q.-Z. Zhang, S. Iwashita, J. Schulze, L.-J. Hou, Y.-N. Wang, U. Czarnetzki

    2011 J. Phys. D 44 285205


5. Secondary electron in dual-frequency capacitively coupled radio-frequency discharges - J. Schulze, 

    Z. Donko, E. Schüngel, U. Czarnetzki 2011 Plasma Sourc. Sci. Technol. 20 045007


6. The Electrical Asymmetry Effect in capacitively coupled radio-frequency discharges - U. Czarnetzki,

     J. Schulze, E. Schüngel, Z. Donko 2011 Plasma Sourc. Sci. Technol. 20 024010


7. The Electrical Asymmetry Effect in multi-frequency capacitively coupled radio frequency discharges -

    J. Schulze, E. Schüngel, Z. Donko, U. Czarnetzki 2011 Plasma Sourc. Sci. Technol. 20 015017


8. Making a geometrically asymmetric capacitive rf discharge electrically symmetric - J. Schulze,

    E. Schüngel, U. Czarnetzki, M. Gebhardt, R. P. Brinkmann, T. Mussenbrock 2011 Appl. Phys. Lett.

    98 031501


9. Power absorption in electrically asymmetric dual frequency capacitive radio frequency discharges -

      E. Schüngel, J. Schulze, Z. Donko, U. Czarnetzki 2011 Phys. of Plasmas 18 013503


2010


1. The effect of secondary electrons on the separate control of ion energy and flux in dual-frequency

    capacitively coupled radio frequency discharges - Z. Donkò, J. Schulze, P. Hartmann, I. Korolov,

    U. Czarnertzki, E. Schüngel 2010 Appl. Phys. Lett. 97 081501


2. The influence of the relative phase between the driving voltages on electron heating in asymmetric

    dual frequency capacitive discharges - D. Ziegler, J. Trieschmann, T. Mussenbrock,

    R. P. Brinkmann, J. Schulze, U. Czarnetzki, E. Semmler, P. Awakowicz, D. O`Connell, T. Gans 2010

    Plasma Sourc. Sci. Technol. 19 045001


3. Excitation dynamics in electrically asymmetric capacitively coupled radio frequency discharges:

    experiment, simulation, and model - J. Schulze, E. Schüngel, Z. Donkò, U. Czarnetzki 2010 Plasma

    Sourc. Sci. Technol.  19 045028


4. Charge dynamics in capacitively coupled radio frequency discharges - J. Schulze, E. Schüngel,

    Z. Donkò, U. Czarnetzki 2010 J. Phys. D 43 225201


5. Phase resolved optical emission spectroscopy: A non-intrusive diagnostic to study electron

    dynamics in capacitively coupled radio frequency discharges - J. Schulze, E. Schüngel, Z. Donkò, 

    D. Luggenhölscher, U. Czarnetzki 2010 J. Phys. D 43 124016


2009


1. The Electrical Asymmetry Effect: A novel and simple method for separate control of ion energy and

    flux in capacitively coupled RF discharges - U. Czarnetzki, B. G. Heil, J. Schulze, Z. Donkò,

    T. Mussenbrock, R. P. Brinkmann 2009 J. Phys. Conf. Series 162 12010


2. Optimization of the Electrical Asymmetry Effect in dual frequency capacitively coupled radio

    frequency discharges: Experiment, simulation, and model - J. Schulze, E. Schüngel, U. Czarnetzki,

    Z. Donkò 2009 J. Appl. Phys. 106 063307


3. Different modes of electron heating in dual-frequency capacitively coupled radio frequency

    discharges - J. Schulze, Z. Donkò, D. Luggenhölscher, U. Czarnetzki 2009 Plasma Sourc. Sci.

    Technol. 18 034011


4. The Electrical Asymmetry Effect in capacitively coupled radio frequency discharges - Measurements

    of DC self bias, ion energy, and ion flux - J. Schulze, E. Schüngel, U. Czarnetzki 2009 J. Phys. D 42

    092005


5. Self-excited nonlinear plasma series resonance oscillations in geometrically symmetric capacitively

    coupled radio frequency discharges - Z. Donkò, J. Schulze, U. Czarnetzki, D. Luggenhölscher 2009

    Appl. Phys. Lett. 94 131501


6. PIC simulations of the separate control of ion flux and energy in CCRF discharges via the electrical

    asymmetry effect - Z. Donkò, J. Schulze, B. G. Heil, U. Czarnetzki 2009 J. Phys. D 42 025205


2008


1. Stochastic heating in asymmetric capacitively coupled RF discharges - J. Schulze, B. G. Heil,

    D. Luggenhölscher, R. P. Brinkmann, U. Czarnetzki 2008 J. Phys. D 41 195212


2. Electron beams in capacitively coupled radio-frequency discharges - J. Schulze, B. G. Heil,

    D. Luggenhölscher, U. Czarnetzki 2008 IEEE Trans. on Plasma Sci. 36 1400


3. Instabilities in capacitively coupled radio-frequency discharges - J. Schulze, D. Luggenhölscher,

    U. Czarnetzki 2008 IEEE Trans. on Plasma Sci. 36 1402


4. Numerical modeling of electron beams accelerated by the radio frequency boundary sheath

    - B. G. Heil, J. Schulze, T. Mussenbrock, R. P. Brinkmann, U. Czarnetzki 2008 IEEE Trans. on

    Plasma Sci. 36 1404


5. Electric field reversals in the sheath region of capacitively coupled radio frequency discharges at

    different pressures - J. Schulze, Z. Donkò, B. G. Heil, D. Luggenhölscher, T. Mussenbrock,

    R. P. Brinkmann, U. Czarnetzki 2008 J. Phys. D 41 105214


6. Electron beams in asymmetric capacitively coupled RF discharges at low pressures - J. Schulze,

    B. G. Heil, D. Luggenhölscher, T. Mussenbrock, R. P. Brinkmann, U. Czarnetzki 2008 J. Phys. D 41

    042003


2007


1. Space and time resolved plasma parameters in an industrial dual-frequency capacitively coupled

    radio frequency discharge - J. Schulze, T. Gans, D. O‘Connell, U. Czarnetzki, A. R. Ellingboe,

    M. M. Turner 2007 J. Phys. D 40 7008


2. Laser spectroscopic electric field measurements in krypton - T. Kampschulte, J. Schulze,

    D. Luggenhölscher, M. D. Bowden, U. Czarnetzki 2007 New Journal of Physics 9 18


3. Diagnostics of the plasma series resonance effect in radio-frequency discharges - J. Schulze,

    T. Kampschulte, D. Luggenhölscher, U. Czarnetzki 2008 J. Phys. Conf. Series 86 12010



2006


1.  Frequency coupling in dual-frequency capacitively coupled radio frequency discharges - T. Gans,

    J. Schulze, D. O‘Connell, U. Czarnetzki, R. Faulkner, A. R. Ellingboe, M. M. Turner 2006 Appl. Phys.

      Lett. 89 261502


2. Diagnostics for the dynamics of power dissipation in technologically used plasmas - T. Gans, D.

    O‘Connell, J. Schulze, V. A. Kadetov, U. Czarnetzki 2006 AIP Conference Proceedings 876 260


2005


1. Phase and space resolved optical emission spectroscopig investigations of an inductively coupled

    RF plasma using an imaging acousto-optic spectrometer - T. Kampschulte, J. Schulze, T. Gans,

    U. Czarnetzki, S. Marke, T. Wallendorf 2005 Surf. and Coat. Technol. 200 859